JPH04738U - - Google Patents
Info
- Publication number
- JPH04738U JPH04738U JP4096390U JP4096390U JPH04738U JP H04738 U JPH04738 U JP H04738U JP 4096390 U JP4096390 U JP 4096390U JP 4096390 U JP4096390 U JP 4096390U JP H04738 U JPH04738 U JP H04738U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer carrier
- spraying
- carrier
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005507 spraying Methods 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4096390U JPH04738U (en]) | 1990-04-17 | 1990-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4096390U JPH04738U (en]) | 1990-04-17 | 1990-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04738U true JPH04738U (en]) | 1992-01-07 |
Family
ID=31551219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4096390U Pending JPH04738U (en]) | 1990-04-17 | 1990-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04738U (en]) |
-
1990
- 1990-04-17 JP JP4096390U patent/JPH04738U/ja active Pending